Cathodoluminescence (CL) is light or electromagnetic radiation ranging from the ultraviolet (UV) to the near-infrared (NIR) regime of the electromagnetic spectrum, which is generated by fast electrons (cathode rays) of an electron beam. The electron beam causes the material to fluoresce as it returns to a ground state.
When an electron beam interacts with a material, a multitude of processes occur which can be employed for various kinds of microscopy. Besides electron signals, a broad spectrum of electromagnetic radiation ranging from x-rays to the mid-IR is generated through a variety of incoherent and coherent processes.
Figure 1: Schematic of the processes that occur when an energetic beam of electrons impinges on a sample. These processes are used for different characterization techniques as indicated in the schematic. Cathodoluminescence is the electromagnetic radiation in the UV/VIS/IR spectral range.
SPARC cathodoluminescence detection system
The SPARC is a cathodoluminescence detector that is designed and produced by Delmic. This system can be retrofitted to any scanning electron system (SEM) to produce high-performance cathodoluminescence images.
This cathodoluminescence detection is unique for its ease-of-use and optimal collection and detection of cathodoluminescence emission.The sensitivity and ease of use make it possible to take any cathodoluminescence application to the next level.
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